Veolia Water Technologies & Solutions

Sievers Boron Ultra Online UPW Analyzer

Continuous, online monitoring of boron down to single parts-per-trillion (ppt) levels

As semiconductor chips shrink and become more complex, the demand for high-quality ultrapure water (UPW) is critical. Even the slightest contamination can cause significant defects, making early detection of impurities essential in microelectronics manufacturing.

What’s at risk? Product yield, downstream processes, and unnecessary costs.

The Sievers Boron Ultra Analyzer provides continuous, unattended online monitoring of boron concentrations in UPW processes with parts-per-trillion (ppt) sensitivity. This supports compliance with primary and polish loop specifications and enables manufacturers to optimize the timing of ion exchange (IX) resin bed regeneration. Boron monitoring is the most proactive IX process control strategy and is far superior than silica or ionic contamination monitoring.

 

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Online Performance & Process Optimization

The Sievers Boron Ultra Analyzer can significantly reduce operating expenses and maintain quality in UPW systems.

Boron Ultra detects an increase in boron prior to silica release, making it a critical tool to prevent the leakage of colloidal and ionic silica into ultrapure water. It is used to predict mixed-bed IX resin exhaustion, optimize electrodeionization (EDI) performance, and control primary and polish loop contamination levels.

Boron Ultra supports the International Roadmap for Devices and Systems (IRDS) 50 ppt boron limit in semiconductor UPW, supporting boron and silica contamination control.

The Sievers Boron Ultra was designed in cooperation with semiconductor manufacturers to meet the needs of facility managers, UPW system owners, and UPW process control engineers. Boron monitoring is the most proactive ion exchange process control strategy and is far superior than silica or ionic contamination monitoring.

  • Parts-per-trillion (ppt) sensitivity
  • 20 data points per hour
  • Compliance with primary and polish loop specifications
  • Optimization of ion exchange resin regeneration
  • Silica and boron contamination control

Features and Benefits

Boron Ultra Features and Benefits

  • Continuous, online monitoring down to single parts-per-trillion (ppt) boron
  • 20 data points per hour
  • Compliance with primary and polish loop specifications
  • Meets all requirements for UKCA and CE marking
  • Multi-stream options – available in One-Stream and Two-Stream
  • Modern, intuitive GUI with multi-color LED backlit, 10.1” touchscreen display
  • Extensive suite of outputs – two isolated 4–20 mA analog outputs; two alarm outputs; two isolated binary outputs; two USB 2.0 ports; and one Gigabit Ethernet port
  • Minimal maintenance and consumables

Applications – Semiconductor & Microelectronics Ultrapure Process Water / UPW

  • Contamination control
  • Compliance
  • Optimization of resin regeneration
  • Process control

Specifications

Boron Ultra Specifications

Operating Specifications

Range 0.010 - 100 ppb B
Limit of Quantification (LOQ) 0.030 ppb B  
Limit of Detection (LOD) 0.010 ppb B
Accuracy ± 0.01 ppb B <0.03 ppb B
± 15%, ≥ 0.03 ppb B
Precision SD ≤ 0.003 ppb B, ≤  0.100 ppb B RSD ≤ 3%, > 0.100 ppb B 
Minimum Sample
Resistivity

15 MΩ–cm

Sample Temperature 15°-40°C (59-104°F)
Sample Flow Rate 50-400 mL/min
Sample Pressure 103-689 kPa (15-100 psig)
Calibration Stability  Typically 12 months 
Sample Particulates 15-micron pre-filtration
Waste Gravity drain (no back pressure), vented 
Analysis Modes Online, Averaged, and Online Timed
Analysis Time1 3 minutes or 6 minutes 

Analyzer Specifications

Power Requirements 100-240 VAC, 40 W4, 50/60 Hz
Safety Certifications  CE, UKCA, ETL listed. Conforms to UL Std. 61010-1. Certified to CSA 22.2 No. 61010-1. 
Display

LED Backlit, 10.1-inch, 1280 x 800 Display with touchscreen

IP Rating  IP 45
Inputs 3 isolated Binary inputs
Outputs 2 isolated 4-20 mA Analog Outputs5; 2 Alarm outputs; 2 isolated Binary Outputs; 2 USB 2.0 Ports6 (one external, one internal); 1 Gigabit Ethernet Port; 
Communication Protocols  Modbus TCP/IP
Transient Overvoltage Installation (Overvoltage) Category II (Instrument Environment Pollution Degree 2 assumed for purposes of testing and judging insulation integrity)
Dimensions  54.2 H x 59.3 W x38.8 D cm (21.35 H x 23.35 W x 15.27 D in)
Weight Empty: 21.75kg (48 lb); With Consumables: 23.1 kg (51 lb)
Minimum Clearances (for temperature, humidity control, and access) Front: 48.3 cm (19 in); Rear 2.5cm (1 in); Sides:30.5 cm (12 in) each side; Top: 30.5 cm (12 in); Bottom: Analyzer stands provide desktop clearance. 
Available Configurations  One-Stream or Two-Stream (Optional)
Ambient Temperature 10-40°C (50-104 °F)
Altitude  Designed for use at altitudes up to 2000 m (6561 ft.)
Maximum Relative Humidity  Up to 95%, non-condensing 

Consumables

Boron Reagent

45 days at 3-minute sampling rate8; 90 days at 6-minute sampling rate8

Reagent Column 12 months
Zero Column 12 months
Peristaltic Pump Head 12 months